Said doping gas control part includes a gas quality flowmeter ( of argon and azote) used by a gas protect part, and a doping case part. 所述的掺杂气体控制部分包气体保护部分使用的氩气、氮气的气体质量流量计及掺杂箱部分;
On the same time, made azote content little higher than control treatment, but the difference quite. 同时使得氮素含量略高于对照处理,但差异很小。