Helicon plasma is a kind of high density, low temperature plasma in low pressure. 螺旋波等离子体是一种高密度的低温低气压等离子体。
Helicon prime shares its sunlight with all worlds nearby. 首阳星和附近的其他星球分享阳光。
The hardware included helicon wave antenna and focusing system. 其中硬件系统主要包括:螺旋波天线和辉光聚焦系统的设计;
Nanocrystalline Si films were deposited on Si ( 100) and glass substrate by helicon wave plasma chemical vapor deposition ( HWPCVD) technique with SiH_4 as reaction gases. 采用螺旋波等离子体化学气相沉积(HWPCVD)技术,以SiH4作为源反应气体在Si(100)和玻璃衬底上制备了纳米Si薄膜。
Ion Density and Energy Distribution Diagnose of a Helicon Plasma 螺旋波等离子体的密度与离子能量分布的诊断
The parameter measurement of Helicon Wave Plasma by a single Langmuir probe 朗谬尔单探针测量螺旋波等离子体参量
In this article, hydrogen plasma was produced by helicon wave and the emission spectrum was detected. The electron number density N_e has been determined by using Stark broadening and the electron temperature T_e has also been obtained. 本文选用电离效率较高的螺旋波方式来激发氢等离子体,根据氢的发射光谱的Stark展宽得到电子密度Ne,并利用二谱线法求得电子温度Te。
Nano Silicon Carbide Films Prepared by Helicon Wave Plasma Chemical Vapor Deposition 螺旋波等离子体化学气相沉积法制备纳米碳化硅薄膜
Spectroscopy diagnosis of hydrogen plasma excited by helicon-wave 螺旋波激发氢等离子体光谱诊断
Microstructure and Optical Properties of Hydrogenated Amorphous Silicon Nitride Films Deposited by Helicon Wave Plasma Enhanced Chemical Vapor Deposition HWP-CVD氮化硅薄膜的结构和光学特性
Hydrogen plasma has been excited by helicon wave and the intensities of the first three lines of Balmer series have been measured. 采用螺旋波激发氢等离子体,测得氢的Balmer线系前三条谱线的强度。
Chapter II presents a simple description of the generation and propagation characteristics of helicon wave. 第二章则介绍了螺旋波等离子体的产生机理与实验装置。
The samples were prepared by helicon wave plasma chemical vapor deposition technique. Raman scattering, infrared absorption and optical absorption measurements were used to analyze the microstructure, hydrogen bonding configurations and energy band structures of the deposited films. 所用样品采用螺旋波等离子体化学气相沉积技术制备,利用Raman散射、红外吸收和光学吸收技术对薄膜的微观结构、氢的键合特征以及能带结构特性进行了分析。
Optical emission spectroscopy ( OES) is used to diagnose the active species emission in the helicon-) wave-) plasma-) enhanced chemical vapor deposition of nanocrystalline silicon. 利用光学发射谱技术对螺旋波等离子体化学气相沉积纳米硅薄膜的等离子体内活性粒子的光发射特征进行了原位测量。
Nanocrystalline silicon carbide ( SiC) thin films have been deposited by helicon wave plasma enhanced chemical vapor deposition ( HWP-CVD) on single crystalline silicon and quartz substrates. 本工作采用螺旋波等离子体增强化学气相沉积技术,在单晶Si及石英衬底上制备了纳米SiC薄膜。
Helicon wave plasma thruster ( HPT) has a high ionization efficiency and a great specific impulse, suitable for the space propulsion of lager quality satellites and probes. 螺旋波等离子体推力器(HPT)的电离效率高,比冲大,适用于较大质量卫星和探测器的空间推进。
The preparations of one dimensional ZnO nanowires and two dimensional ZnO quantum wells have been achieved by thermally evaporating and helicon wave plasma assistance radio frequency sputtering techniques, separately. 本工作分别采用热蒸发技术和螺旋波等离子体辅助射频溅射技术研究了一维ZnO纳米线和二维ZnO量子阱结构的制备过程。