The principle of process, characteristic and research status on the several typical microfabrication techniques used to fabricate MEMS devices are given a review in this paper. 文章综述了用于制备MEMS器件的几种典型微细加工技术的工艺原理、特点以及研究现状,并展望了这些微细加工技术的发展前景。
State Key Laboratory of optical technologies on microfabrication 微细加工光学技术国家重点实验室
Electron and ion beam microfabrication 电子束与离子束微细加工
They have also combined advances in nanotechnology and microfabrication to make implantable microchips that can deliver drugs precisely and on schedule. 他们也结合奈米科技与显微合成技术,制造了植入式微晶片,使其能定时定量投药。
Preparation of Microelectrodes Using Microfabrication Technique and Their Application in the Field of Biological Wastewater Treatment 基于微细加工技术的微电极的制备及其在废水生物处理中的应用
The specific microfabrication of electromagnetic MEMS is presented, and the applying prospect of electromagnetic MEMS is also given. 介绍了电磁MEMS技术中的典型制作技术,展望了电磁MEMS技术的应用前景。
In the recent years, demands of microfabrication equipment which is a basic technique of MEMS are increasing along with the rapid development of MEMS. 近年来,微型机电系统技术高速发展,对作为其基础技术的微细加工设备的需求也越来越大。
Based on the surface science and microfabrication technology, the new microreactors have been developed rapidly. 以表面科学与微制造技术为核心,新型微反应器近年来发展很快。
Advanced microfabrication technologies are important methods for the fabrication of devices with structures in micron scales. 现代微加工技术是制备具有微米、亚微米甚至纳米结构器件的重要手段。
Microfabrication Technologies for Microreactors 微反应器中的微制作技术
The investigations and variant applications in micro vacuum electronic devices ( μ VEDs) are expanding by day and day with vacuum micro-electronics and microfabrication technologies developed. 随着真空微电子学和微加工技术的发展,微真空电子器件的研究范围日益扩展并逐步扩大了各领域的重要应用。
Recent developments in microfabrication have produced new opportunities in vacuum electronics. 微加工技术为真空电子技术的发展提供了新的领域和新的应用。
The first review introduces the development of the Miniaturized Total Analysis System ( u-TAS) and the microfluidic analytical systems, including microfabrication techniques and detection technologies of microfluidic chips. 第一部分先介绍了微全分析系统的概况以及微流控芯片近年的研究状况,包括芯片的微细加工新技术和检测系统研究进展。
The fabrication technique of three-dimensional microstructure is important in the MEMS microfabrication technology. 三维微结构制作技术是MEMS加工的关键技术之一。
The structure and microfabrication, the detecting theory and way of biomolecular recognition device based on giant magnetoresistance ( GMR) effects were introduced, also the signal detecting and processing instrumentation was presented. 对基于巨磁电阻(GMR)效应的生物分子识别器件的结构和微加工,以及检测原理、检测方法进行了介绍,构建了对应于这种生物分子识别器件的信号检测和处理系统。
The microfabrication techniques for piezoelectric unimorph cantilevers were investigated. 对压电双晶梁结构进行了微型化工艺研究。
Microfabrication techniques and their applications are introduced, including femtosecond laser induced refractive index change for fabrication of optical waveguides, gratings and couplers; 本文介绍了在透明材料内部或表面进行微制备的方法和应用,包括利用飞秒激光诱导的折射率变化来制作光波导、光栅和耦合器等;
Some new technologies of micro-mechanism manufacture are discussed, such as microfabrication technology for surface/ bulk, LIGA and silicon direct bonding technologies and so on. Besides, the application foreground in MEMS products using these new technologies is also expounded. 论述了微电子机械制造中的主要技术,包括表面微细加工、体微细加工、光刻-电铸-注塑(LIGA)、硅直接键合技术等,并讨论了这些新技术在MEMS产品中的应用前景。
The principle and current application of the femtosecond two-photon microfabrication are introduced. 介绍了飞秒激光双光子微细加工技术的原理和应用的现状。
This project provided valuable exploration and consultant for the future design of the micromachine used for the electrochemical microfabrication by the whole system design and analysis of the microspindle. 本论文通过对微型主轴系统的整体设计和结构分析,为此类用于微纳米加工的新型微型机械的设计、制造做出了有益的探索,提供了重要的参考价值。
This article looks back on some progress of guided-wave optics, fabrication and measurement of waveguides, devices, monolithic integration and microfabrication techniques in China over the past 10 years and a brief comment on anticipated trends and needs in the field of integrated optics is given. 本文回顾了我国在过去十年中导波光学、波导制备和测试、波导器件、单片集成以及微加工技术等方面所取得的进展,指出了集成光学的发展趋势和需求。
Microfabrication of periodic structures by holographic lithography technology combining with visible laser-induce photopolymerization is developed in this paper. 本文报道用激光全息技术结合可见光光聚合制作周期结构的方法和物理机制;
The micro total analytical system have a bearing on the micro electronic technology and microfabrication techniques. 介绍了一种与微电子技术及微制造技术相关的微型整体分析系统,主要是有关以电渗流为基础的微型流动注射分析系统的发展。
Study on a new concept for realizing microfabrication based on laser trapping microparticles 基于激光捕捉微粒子实现微细加工的新概念研究
SED is a new type of flat-panel display technology, combining with electron-emission technology, microfabrication technologies, cathode-ray-tube ( CRT) technology and mass-production technologies for liquid crystal displays and semiconductors. 表面传导显示技术是结合了电子发射技术、微制造技术、CRT技术、大规模液晶显示器生产技术及半导体技术而研发出的新型平板显示技术。
Sub-Wavelength Gratings Based on a New Microfabrication Technology 基于一种新微细加工技术的亚波长光栅的研制
This thesis study the simulation of electromagnetic field of MB chip and two key fabrication processes& fabrication of planar electromagnetic devices based on UV-LIGA and polymeric microfabrication. 本论文研究了磁珠芯片中的电磁场模拟分析,以及两种关键工艺&基于UV-LIGA的平面电磁器件制作工艺和塑性材料微加工制作工艺。在此基础上,设计、制作并封装了新型磁珠微芯片。
A New Method for Microfabrication Focused Ion Beam Technology and Combination System 新一代微细加工的手段聚焦离子束技术及组合系统
Space TWT will be obtained excellent development, employing advanced simulation-based-design, long life cathode and new microfabrication methods. 采用先进的计算机模拟设计技术,使用长寿命阴极以及各种先进的微加工制造技术必使空间行波管更完善,得到更大的发展。
At present, two-photon technique has been applied in high-density data storage, single-molecule detection, medical diagnosis, three-dimensional microfabrication and so on. 目前双光子技术已应用于高密度数据存储、单分子检测、医疗诊断以及三维精细加工等领域的研究和开发,取得了重要的成果。