Planar windings manufactured by LIGA technology and silicon micromachine technology are connected with three-phase wye connection. 定子为平面线圈,是采用硅微机械加工技术和LIGA工艺制作的。
Studying on the Optical Tweezers Technique and Its Application in Optically Driven Micromachine Motors 光镊技术及其在光驱动微机械马达的应用研究
Bonding Technology for Silicon Wafer with Patterns in the Process of Micromachine 微机械加工中的图形硅片键合技术
The etching technology using excimer laser has extensive application prospect in micromachine. The microstructure fabrications by using this technology have the merits such as large depth width ratio, high precision, and simple techniques. 准分子激光刻蚀技术在微机械领域有着十分广泛的应用前景,用该技术制作的聚合物微结构深宽比大、精度高,并且工艺简单。
Hybrid Silicon Micromachine and Optical Fibre Array Sensor 硅微机械与光纤组合式列阵传感器
The Latest Development of Research of Micromachine and Microrobot 微机械和微机器人研究的最新进展
A new type of zine oxide ( ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology. 利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。
The major contributions of the work presented in this thesis are listed as follows: 1. The microwave energy supply system for in-pipe inspect micromachine was set up by using microwave transmission theory. 利用微波输能技术的理论为不锈钢管道无缆探测微机器人建立了一套微波供能系统,它包括不锈钢管道微波激励装置和管道内微波能量接收装置(整流天线)。
A kind of silicon micromachine F-P cavity variable attenuator is introduced. Basic structure and basic principle is described. It has advantages of minuteness volume, low insertion loss, high adjustment precision. 一种新型的硅微机械FP腔可变衰减器,具有体积小、插入损耗低、调节精度高等优点,介绍了其基本结构、基本原理。
Genetic algorithm is applied to optimize designing structure of micromachine properties tester. 本文采用遗传算法对微机械力学性能测试仪微加载机构设计进行优化。
The rotors and stators of the micromotor are all planar, the windings are made planar, grooveless and concentric using the LIGA technology and silicon micromachine technology. 定子和转子都做成平面结构,定子线圈采用了平面型、无槽式集中绕组;
A new idea is presented that how a large complex multichannel spectrum analyzing system can be integrated and miniaturized using micromachine technique and normal semiconductor integrated circuit technology. 提出用微机械技术和常规半导体集成电路微细加工技术将庞大复杂的多道成像光谱分析系统集成化和微型化的新思想。
This paper presents the driving characteristics, moving properties and theoretical analysis of electromagnetic micromachine in small pipes. 本文介绍电磁式微小管道内机器人的工作原理、运动特性和理论分析。
A special technology for making new hybrid silicon micromachine and optic fiber array sensor is systematically presented in the paper. 系统地介绍了一种新颖的硅微机械与光纤组合式列阵传感器的特殊制造工艺。
This project provided valuable exploration and consultant for the future design of the micromachine used for the electrochemical microfabrication by the whole system design and analysis of the microspindle. 本论文通过对微型主轴系统的整体设计和结构分析,为此类用于微纳米加工的新型微型机械的设计、制造做出了有益的探索,提供了重要的参考价值。
New Absorbing Layer for Infrared Thermal Detector of Micromachine 一种新型微机械红外热探测器的吸收层
This article describes the development of Micromachine and Micro sensor in Japan, and the progress of project "Micromachine Technology" and related technology. 本文介绍了近几年日本微型机械技术和微型传感器技术的主要进步,详细介绍了微型机械项目的进展情况,及其所涉及的各种新技术。
Experimental Study on Micromachine Actuator Used in Pipe Lines Inspection 基于管道检查用微型机械驱动器试验研究
In order to facilitate the advancement of micro-fabrication and micromachine technologies, development of measurement methods for both profile and dimension of micro-components are essential. 为了推动微加工和微机械技术的进步,微型零件轮廓和尺度测量方法的发展非常重要。
The Exciting Device of Microwave Energy Supply System for In-pipe Inspect Micromachine 管道探测微机器人微波输能系统激励装置
The high temperature coefficient and low temperature limit of Nd-Fe-B is a very unfavourable factor. Because the temperature rising of micromachine is lower, it will have not much influence on the performance of DC servomotor. 钕铁硼永磁材料的缺点是高的温度系数和低的温度限制,但是控制微电机的温升较低,对电机的性能不会产生影响。
On the Developing Trend of Micromachine Technology 微特电机技术发展趋势探讨
Study on the dynamics of micromachine 微机械动力学研究
Micromachine is an advanced interdisciplinary technology, and it has great prospect. 微型机械是在微电子工艺的基础上发展起来的多学科交叉的前沿研究领域,具有广阔的应用前景。
Study on Instrument of Revolving Micromachine Dynamic measurement 微型机械旋转运动动态参数测试仪研究
Research on Statics and Dynamics of Electrostatic Comb-Drive in Micromachine 微机械中静电梳齿结构的静动力学研究
Analysis for the variable attenuator optical property of silicon micromachine F-P cavity 硅微机械F-腔可变衰减器光学特性分析
Circuit wiring technology in the micromachine optoelectronic integrated system on silicon wafer 微硅型光机电系统集成化技术中的金属布线
The nonlinearity of moment angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method. Under the considering of this nonlinearity, the frequency characteristic of the sensor is analyzed. 用能量法计算了振动轮式微机械角速率传感器中梁的力矩&转角的非线性关系,分析了在这种非线性影响下的传感器幅频、相频特性。
Research on Applications of Micromachine Technology in Medical Engineering 微机械技术应用于医疗工程的研究