Pentadecane, anhydrous ethanol and distilled water were used as lubricants during the tests. Single crystal silicon showed the lowest friction coefficient ( 0.136) and wear volume under lubrication of pentadecane. 结果表明:在十五烷润滑下单晶硅的摩擦系数和磨损体积损失最低,而在蒸馏水润滑下的摩擦系数和磨损体积损失最大;